Special Lamps for IR Applications

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These special short-wave Halogen infrared lamps (IR-A) have been especially developed for applications like RTP (Rapid Thermal Process) or CVD (Chemical Vapour Deposit) in the semiconductor industry. These lamps have a maximum radiation at a wavelength of about 850 nm. They efficiently convert electrical energy into radiated heat. Further important advantages of heating with these Halogen infrared lamps are a very quick reaction time and accurate controllability between 0 and 100%. They consist of a tungsten heating coil and a quartz tube. The filling contains halogen additives in order to avoid blackening of the lamps and to ensure very high stability throughout the lifetime.